IONIZED CLUSTER BEAM TECHNIQUE FOR THIN-FILM DEPOSITION

被引：21

作者：

TAKAGI, T

机构：

来源：

ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS | 1986年 / 3卷 / 2-3期

关键词：

D O I：

10.1007/BF01384816

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

页码：271 / 278

页数：8

共 26 条

[1] EFFECT OF ION IRRADIATION ON FORMATION, STRUCTURE AND PROPERTIES OF THIN METAL-FILMS
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GUSEVA, MB
[J]. THIN SOLID FILMS, 1976, 38 (01) : 1 - 8
[2] KOYANAGI T, 1984, 8TH P S ION SOURC IO, P285
[3] SIO2-FILMS DEPOSITED ON SI BY AN IONIZED CLUSTER BEAM
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YAMANISHI, K
TSUKAMOTO, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1148 - 1151
[4] NEUGEBAUER CA, 1970, HDB THIN FILM TECHNO, pCH8
[5] Stein G. D., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1165
[6] FILM FORMATION TECHNIQUE BY IONIZED-CLUSTER BEAM
TAKAGI, T
YAMADA, I
TAKAOKA, H
[J]. SURFACE SCIENCE, 1981, 106 (1-3) : 544 - 550
[7] IONIZED-CLUSTER BEAM EPITAXY OF CDTE AND ITS APPLICATION TO CDTE/PBTE MULTILAYER STRUCTURE
TAKAGI, T
TAKAOKA, H
KURIYAMA, Y
MATSUBARA, K
[J]. THIN SOLID FILMS, 1985, 126 (1-2) : 149 - 154
[8] ION-SURFACE INTERACTIONS DURING THIN-FILM DEPOSITION
TAKAGI, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 382 - 388
[9] TAKAGI T, 1984, MATER RES SOC S P, V27, P501
[10] TAKAGI T, 1972, 2ND P INT C ION SOUR, P790