FILM FORMATION TECHNIQUE BY IONIZED-CLUSTER BEAM

被引：13

作者：

TAKAGI, T

YAMADA, I

TAKAOKA, H

机构：

来源：

SURFACE SCIENCE | 1981年 / 106卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(81)90249-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：544 / 550

页数：7

共 11 条

[1] THIN-FILM DEPOSITION FROM BEAMS OF IONIZED ATOMS AND CLUSTERS [J].

KUIPER, AET ;

THOMAS, GE ;

SCHOUTEN, WJ .

JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) :332-333

[2] PROPERTIES OF ZNO FILMS PREPARED BY REACTIVE IONIZED CLUSTER BEAM DEPOSITION [J].

MATSUBARA, K ;

YAMADA, I ;

NAGAO, N ;

TOMINAGA, K ;

TAKAGI, T .

SURFACE SCIENCE, 1979, 86 (JUL) :290-299

[3] IONIZED-CLUSTER BEAM DEPOSITION [J].

TAKAGI, T ;

YAMADA, I ;

SASAKI, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1128-1134

[4] EVALUATION OF METAL AND SEMICONDUCTOR-FILMS FORMED BY IONIZED-CLUSTER BEAM DEPOSITION [J].

TAKAGI, T ;

YAMADA, I ;

SASAKI, A .

THIN SOLID FILMS, 1976, 39 (DEC) :207-217

[5] OPTICAL AND THERMAL-PROPERTIES OF BEO THIN-FILMS PREPARED BY REACTIVE IONIZED-CLUSTER BEAM TECHNIQUE [J].

TAKAGI, T ;

MATSUBARA, K ;

TAKAOKA, H .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) :5419-5424

[6] NEW DEVELOPMENTS IN IONIZED-CLUSTER BEAM AND REACTIVE IONIZED-CLUSTER BEAM DEPOSITION TECHNIQUES [J].

TAKAGI, T ;

MATSUBARA, K ;

TAKAOKA, H ;

YAMADA, I .

THIN SOLID FILMS, 1979, 63 (01) :41-51

[7]

TAKAGI T, 1978, I PHYS C SER, V38, P229

[8]

TAKAGI T, 1979, P INT C ION PLATING, P174

[9]

TAKAGI T, 1972, 2ND P INT C ION SOUR, P790

[10]

TAKAGI T, 1978, I PHYS C SER, V38, P142

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