A SEMIDYNAMIC STUDY OF POLYMER SURFACE-MORPHOLOGY DEVELOPMENT IN KAPTON-H SPUTTER ETCHED BY 6 KEV XENON ATOMS

被引：6

作者：

MICHAEL, R

STULIK, D

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 02期

关键词：

D O I：

10.1016/0168-583X(87)90115-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：259 / 263

页数：5

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