COMPARATIVE STATUS OF PULSED ION-IMPLANTATION

被引：13

作者：

GYULAI, J

KRAFCSIK, I

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90185-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：275 / 279

页数：5

共 31 条

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[7] HIGH-ENERGY-DENSITY PULSED ION-BEAM IRRADIATION OF CO/SI, PT/SI, AND AU/SI [J].

FASTOW, R ;

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