ELECTROMIGRATION-STIMULATED MOTION OF A LIQUID ALLOY DEFECT IN ALUMINUM THIN-FILMS

被引：7

作者：

HOWARD, JK ^{[1
]}

机构：

[1] IBM CORP,SYST PROD DIV,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.1662505

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1997 / 2001

页数：5

共 29 条

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[5]

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[7]

BLACK JR, 1969, IEEE T ELECTRON DEV, V16, P348

[8] ELECTROMIGRATION IN THIN AL FILMS [J].

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MEIERAN, ES .

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[9] SOME OBSERVATIONS ON ELECTROMIGRATION IN ALUMINUM FILMS [J].

GHATE, PB .

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[10] INFRARED TECHNIQUES FOR MEASURING TEMPERATURE AND RELATED PHENOMENA OF MICROCIRCUITS [J].

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