FUNDAMENTAL CHEMICAL PROCESSES IN A LOW-DENSITY 27-MHZ HELIUM ICP

被引:13
作者
MILLER, DC [1 ]
FANNIN, HB [1 ]
FLEITZ, PA [1 ]
SELISKAR, CJ [1 ]
机构
[1] UNIV CINCINNATI,DEPT CHEM,CINCINNATI,OH 45221
关键词
D O I
10.1366/0003702864508719
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
30
引用
收藏
页码:611 / 617
页数:7
相关论文
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