MINIMUM DETECTABLE DIMENSION, RESOLVING POWER AND QUANTIFICATION OF SCANNING AUGER MICROSCOPY AT HIGH LATERAL RESOLUTION

被引：29

作者：

CAZAUX, J

机构：

来源：

关键词：

D O I：

10.1002/sia.740140612

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：354 / 366

页数：13

共 16 条

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