LINE RESOLUTION IN THE SUB-10-NANOMETER RANGE IN SAM

被引：18

作者：

CAZAUX, J ^{[1
]}

CHAZELAS, J ^{[1
]}

CHARASSE, MN ^{[1
]}

HIRTZ, JP ^{[1
]}

机构：

[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE

来源：

ULTRAMICROSCOPY | 1988年 / 25卷 / 01期

关键词：

D O I：

10.1016/0304-3991(88)90403-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：31 / 34

页数：4

共 10 条

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[2] CAZAUX J, 1987, J MICROSC-OXFORD, V145, P257
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[5] INTERPRETATION OF THE SPATIAL-RESOLUTION OF THE SCANNING AUGER-ELECTRON MICROSCOPE - THEORY-EXPERIMENT COMPARISON
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[6] EFFECT OF BACKSCATTERED ELECTRONS ON RESOLUTION OF SCANNING AUGER MICROSCOPY
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[7] AUGER ELECTRON SPECTROSCOPY IN SCANNING ELECTRON MICROSCOPE - AUGER ELECTRON IMAGES
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[J]. APPLIED PHYSICS LETTERS, 1971, 19 (09) : 315 - +
[8] TECHNIQUES FOR THE CORRECTION OF TOPOGRAPHICAL EFFECTS IN SCANNING AUGER-ELECTRON MICROSCOPY
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[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) : 374 - 381
[9] AUGER-ELECTRON SPECTROSCOPY AT HIGH SPATIAL-RESOLUTION AND NA PRIMARY BEAM CURRENTS
TODD, G
POPPA, H
MOORHEAD, D
BALES, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 953 - 955
[10] HIGH SPATIAL-RESOLUTION AUGER LINESCANS ACROSS HETEROGENEOUS CHEMICAL EDGES BY MONTE-CARLO CALCULATION
TUPPEN, CG
DAVIES, GJ
[J]. SURFACE AND INTERFACE ANALYSIS, 1985, 7 (05) : 235 - 240

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