HIGH SPATIAL-RESOLUTION AUGER LINESCANS ACROSS HETEROGENEOUS CHEMICAL EDGES BY MONTE-CARLO CALCULATION

被引:15
作者
TUPPEN, CG
DAVIES, GJ
机构
[1] British Telecom Research Lab, Ipswich, Engl, British Telecom Research Lab, Ipswich, Engl
关键词
SPECTRUM ANALYSIS;
D O I
10.1002/sia.740070508
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Previous calculations have shown that Auger yields increase at chemical edge/free space interfaces. In this paper we consider the edge formed by a well defined thin film on a substrate of different chemical composition. Two systems have been investigated: Au and Si and Al on Si. Linescans are presented for a number of different electron beam configurations and show significant features attributable to an edge effect. These effects are explained in terms of the different layer materials and their corresponding backscatter coefficients.
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页码:235 / 240
页数:6
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