INTERPRETATION OF THE SPATIAL-RESOLUTION OF THE SCANNING AUGER-ELECTRON MICROSCOPE - THEORY-EXPERIMENT COMPARISON

被引：33

作者：

ELGOMATI, MM

JANSSEN, AP

PRUTTON, M

VENABLES, JA

机构：

[1] Department of Physics, University of York, Heslington, York

来源：

SURFACE SCIENCE | 1979年 / 85卷 / 02期

关键词：

D O I：

10.1016/0039-6028(79)90254-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Two modes of scanning Auger microscopy for oblique incidence and sharp chemical edges are defined and discussed using a Monte-Carlo method reported earlier. A theory/experiment comparison for a silver edge on a tungsten substrate confirms that the spatial resolution in SAM is controlled by incident beam size. The orientation of the edge with respect to the scan direction is shown to have a strong effect upon the spatial resolution. © 1979.

引用

页码：309 / 316

页数：8

共 11 条

[1] DIGITAL SCANNING AUGER-ELECTRON MICROSCOPE INCORPORATING A CONCENTRIC HEMISPHERICAL ANALYZER [J].

BROWNING, R ;

BASSETT, PJ ;

ELGOMATI, MM ;

PRUTTON, M .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1977, 357 (1689) :213-+

[2] COMPARISON OF ELECTRON SOURCES FOR HIGH-RESOLUTION AUGER-SPECTROSCOPY IN AN SEM [J].

CHRISTOU, A .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5464-5466

[3] MONTE-CARLO CALCULATIONS OF SPATIAL-RESOLUTION IN A SCANNING AUGER-ELECTRON MICROSCOPE [J].

ELGOMATI, MM ;

PRUTTON, M .

SURFACE SCIENCE, 1978, 72 (03) :485-494

[4] EFFECT OF BACKSCATTERED ELECTRONS ON RESOLUTION OF SCANNING AUGER MICROSCOPY [J].

JANSSEN, AP ;

VENABLES, JA .

SURFACE SCIENCE, 1978, 77 (02) :351-364

[5] INFLUENCE OF BACKSCATTERED ELECTRONS ON LATERAL RESOLUTION IN SCANNING AUGER MICROSCOPY [J].

KIRSCHNER, J .

APPLIED PHYSICS, 1977, 14 (04) :351-354

[6]

MOGAMI A, UNPUBLISHED

[7] APPLICATION OF MONTE-CARLO CALCULATION TO FUNDAMENTALS OF SCANNING AUGER-ELECTRON MICROSCOPY [J].

SHIMIZU, R ;

ARATAMA, M ;

ICHIMURA, S ;

YAMAZAKI, Y ;

IKUTA, T .

APPLIED PHYSICS LETTERS, 1977, 31 (10) :692-694

[8] AUGER-ELECTRON SPECTROSCOPY AT HIGH SPATIAL-RESOLUTION AND NA PRIMARY BEAM CURRENTS [J].

TODD, G ;

POPPA, H ;

MOORHEAD, D ;

BALES, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04) :953-955

[9]

TODD G, UNPUBLISHED

[10] SCANNING AUGER-ELECTRON MICROSCOPY AT 30 NM RESOLUTION [J].

VENABLES, JA ;

JANSSEN, AP ;

HARLAND, CJ ;

JOYCE, BA .

PHILOSOPHICAL MAGAZINE, 1976, 34 (03) :495-500

← 1 2 →