SCANNING AUGER-ELECTRON MICROSCOPY AT 30 NM RESOLUTION

被引：47

作者：

VENABLES, JA ^{[1
]}

JANSSEN, AP ^{[1
]}

HARLAND, CJ ^{[1
]}

JOYCE, BA ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH MATH & PHYS SCI,BRIGHTON BN1 9QH,SUSSEX,ENGLAND

来源：

PHILOSOPHICAL MAGAZINE | 1976年 / 34卷 / 03期

关键词：

D O I：

10.1080/14786437608222040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：495 / 500

页数：6

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[2] BISHOP HE, 1974, AERE7899 REP
[3] BRANDIS EK, 1975, IITRISEM1975, P141
[4] CHRISTOU A, 1975, IITRISEM1975, P149
[5] JOY DC, 1974, ADV ANAL MICROSTRUCT, P20
[6] LEGRESSUS C, 1975, CR ACAD SCI B PHYS, V280, P439
[7] MCDONALD NC, 1971, IITRI SCANNING ELECT, P89
[8] HIGH-SPATIAL RESOLUTION AUGER-SPECTROSCOPY AND AUGER INTEGRATION APPLICATIONS
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HAAS, TW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 370 - 374
[9] SCANNING AUGER-ELECTRON MICROSCOPE FOR SURFACE STUDIES
POWELL, BD
WOODRUFF, DP
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[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1975, 8 (07): : 548 - 552
[10] AUGER-ELECTRON SPECTROSCOPY AT HIGH SPATIAL-RESOLUTION AND NA PRIMARY BEAM CURRENTS
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MOORHEAD, D
BALES, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 953 - 955