ENHANCED SENSITIVITY AND DEPTH RESOLUTION OF OXYGEN DETECTION COMBINING RESONANCE SCATTERING AND TILTED TARGET METHODS

被引：11

作者：

KOTAI, E

MEZEY, G

LOHNER, T

MANUABA, A

PASZTI, F

GYULAI, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1981年 / 180卷 / 2-3期

关键词：

D O I：

10.1016/0029-554X(81)90107-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：619 / 623

页数：5

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[2]

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[3] COMPARISON OF TECHNIQUES FOR DEPTH PROFILING OXYGEN IN SILICON [J].

MEZEY, G ;

KOTAI, E ;

NAGY, T ;

LOHNER, L ;

MANUBA, A ;

GYULAI, J ;

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EVANS, CA ;

BLATTNER, RJ .

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[4]

MEZEY G, 1976, ION BEAM SURFACE LAY, V1, P303

[5]

MEZEY G, UNPUBLISHED

[6] DETERMINATION OF OPTIMUM DEPTH-RESOLUTION CONDITIONS FOR RUTHERFORD BACKSCATTERING ANALYSIS [J].

WILLIAMS, JS ;

MOLLER, W .

NUCLEAR INSTRUMENTS & METHODS, 1978, 157 (02) :213-221

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