ELECTRON-IRRADIATION DILATATION IN SIO2

被引：16

作者：

SIGSBEE, RA ^{[1
]}

WILSON, RH ^{[1
]}

机构：

[1] GE,CORP RES & DEV,SCHENECTADY,NY 12301

来源：

APPLIED PHYSICS LETTERS | 1973年 / 23卷 / 10期

关键词：

D O I：

10.1063/1.1654741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：541 / 542

页数：2

共 11 条

[1] RADIATION EFFECTS IN SILICA AT LOW TEMPERATURES [J].

ARNOLD, GW ;

COMPTON, WD .

PHYSICAL REVIEW, 1959, 116 (04) :802-811

[2]

BURKE J, 1966, PROGR CERAMIC SCIENC, V4, pCH1

[3] LATTICE DISPLACEMENTS BY FAST ELECTRONS [J].

COMPTON, WD ;

ARNOLD, GW .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (04) :621-625

[4] RADIATION EFFECTS IN FUSED SILICA AND ALPHA-AL2O3 [J].

COMPTON, WD ;

ARNOLD, GW .

DISCUSSIONS OF THE FARADAY SOCIETY, 1961, (31) :130-&

[5] LOCAL STRESS MEASUREMENT IN THIN THERMAL SIO2 FILMS ON SI-SUBSTRATES [J].

LIN, SCH ;

PUGACZMU.I .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) :119-&

[6] INVESTIGATION OF STATIC ELECTRON-IRRADIATION EFFECTS IN BULK SI AND THIN SI FILMS AT ENERGIES FAR BELOW THRESHOLD [J].

NORRIS, CB .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) :4060-+

[7] FABRICATION OF PLANAR SILICON TRANSISTORS WITHOUT PHOTORESIST [J].

OKEEFFE, TW ;

HANDY, RM .

SOLID-STATE ELECTRONICS, 1968, 11 (02) :261-&

[8] RADIATION DAMAGE IN VITREOUS SILICA - ANNEALING OF THE DENSITY CHANGES [J].

PRIMAK, W ;

SZYMANSKI, H .

PHYSICAL REVIEW, 1956, 101 (04) :1268-1271

[9] RADIATION COMPACTION OF VITREOUS SILICA [J].

PRIMAK, W ;

KAMPWIRTH, R .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) :5651-+

[10]

SEITZ F, 1955, SOLID STATE PHYSICS, V2

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