GROWTH AND CRYSTALLOGRAPHIC ANALYSIS OF YBA2CU3OX THIN-FILMS ON NDGAO3 SUBSTRATES

被引:23
作者
MUKAIDA, M
MIYAZAWA, S
机构
[1] NTT LSI Laboratories, Atsugi-shi, Kanagawa, 243-01, 3-1, Morinosato Wakamiya
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1992年 / 31卷 / 10期
关键词
YBA2CU3OX; NDGAO3; A-AXIS GRAIN; INPLANE ALIGNMENT;
D O I
10.1143/JJAP.31.3317
中图分类号
O59 [应用物理学];
学科分类号
摘要
The growth and crystallographic analysis of a-axis-oriented YBa2Cu3Ox (abbreviated to YBCO) grains in c-axis-oriented films on NdGaO3 substrates is described. a-axis-oriented grains grow at high substrate temperatures and high oxygen pressures. Reflection high energy electron diffraction (RHEED) patterns and phi-scan (in-plane rotation) X-ray measurements reveal that the grains exhibit a twofold symmetry indicating independent b- and c-axis orientations in the surface plane. The in-plane orientation of a-axis-oriented grains is thought to be responsible for the rectangular surface lattice of (110) NdGaO3 substrate.
引用
收藏
页码:3317 / 3322
页数:6
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