THICK AND HOMOGENEOUS SURFACE-LAYERS OBTAINED BY REACTIVE ION-BEAM-ENHANCED DEPOSITION

被引:22
作者
GUZMAN, L [1 ]
GIACOMOZZI, F [1 ]
MARGESIN, B [1 ]
CALLIARI, L [1 ]
FEDRIZZI, L [1 ]
OSSI, PM [1 ]
SCOTONI, M [1 ]
机构
[1] UNIV TRENTO,FAC SCI,I-38100 TRENTO,ITALY
来源
MATERIALS SCIENCE AND ENGINEERING | 1987年 / 90卷
关键词
ION BEAMS - Effects - NITRIDES - Surface Properties - SURFACES - Modification;
D O I
10.1016/0025-5416(87)90232-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A recently developed method, reactive ion-beam-enhanced deposition (RIBED), which consists of simultaneous or sequential deposition and implantation steps, has proved to be very effective in the production of surface compounds with interesting surface properties. In this work, we consider surface nitrides of chromium and boron, which are known to be hard and corrosion resistant. The surface compounds were characterized using various different techniques: Auger electron spectroscopy, secondary ion mass spectrometry, X-ray diffractometry and scanning electron microscopy. Electrochemical measurements were carried out on the chromium and boron nitride layers, obtained by RIBED, on iron.
引用
收藏
页码:349 / 355
页数:7
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