CHARACTERIZATION OF THICK CHROMIUM-CARBON AND CHROMIUM-NITROGEN FILMS DEPOSITED BY HOLLOW-CATHODE DISCHARGE

被引：60

作者：

KOMIYA, S ^{[1
]}

ONO, S ^{[1
]}

UMEZU, N ^{[1
]}

NARUSAWA, T ^{[1
]}

机构：

[1] ULVAC CORP,CHIGASAKI 253,JAPAN

来源：

关键词：

D O I：

10.1016/0040-6090(77)90230-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：433 / 445

页数：13

共 20 条

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ONO, S
UMEZU, N
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