GALLIUM-PHOSPHIDE FILMS DEPOSITED BY SPUTTERING

被引:10
作者
SOSNIAK, J
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期
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D O I
10.1116/1.1315764
中图分类号
O59 [应用物理学];
学科分类号
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页码:110 / &
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