SPUTTERING YIELDS OF SEVERAL SEMICONDUCTING COMPOUNDS UNDER ARGON ION BOMBARDMENT

被引：37

作者：

COMAS, J

COOPER, CB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1966年 / 37卷 / 07期

关键词：

D O I：

10.1063/1.1782130

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2820 / &

共 11 条

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