NMR-STUDY OF COMPOSITIONAL INHOMOGENEITIES IN SPUTTERED CO-CR FILMS

被引:37
作者
TAKEI, K
MAEDA, Y
机构
[1] NTT Basic Research Laboratories, Tokai Ibaraki
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1991年 / 30卷 / 6B期
关键词
NUCLEAR MAGNETIC RESONANCE; CO-CR THIN FILM; MAGNETIC RECORDING; COMPOSITIONAL SEPARATION; MAGNETIC MICROSTRUCTURE; SPIN ECHO;
D O I
10.1143/JJAP.30.L1125
中图分类号
O59 [应用物理学];
学科分类号
摘要
The development of compositional inhomogeneities in sputtered Co-22 at.% Cr films is studied as a function of substrate temperature using the spin-echo Co-59-NMR technique. It is observed that a highly Co-rich component grows as the substrate temperature increases from 30-degrees-C to 400-degrees-C. The Cr content of the Co-rich part in the film deposited at 400-degrees-C is estimated to be as low as 5-7 at.%. The results are consistent with the appearance of a clearly striped compositional microstructure which suggests compositional separation.
引用
收藏
页码:L1125 / L1128
页数:4
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