NUCLEAR ANALYSIS OF ZIRCONIUM NITRIDE THIN-FILMS

被引：12

作者：

SIMPSON, JCB ^{[1
]}

EARWAKER, LG ^{[1
]}

KHAN, MN ^{[1
]}

机构：

[1] DOWTY ELECTR LTD,LONDON,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 24-5卷

关键词：

D O I：

10.1016/S0168-583X(87)80229-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：701 / 704

页数：4

相关论文

共 5 条

[1] LIGHT-ELEMENTS ANALYSIS AND APPLICATION TO GLASS INDUSTRY
DEBRAS, G
DECONNINCK, G
[J]. JOURNAL OF RADIOANALYTICAL CHEMISTRY, 1977, 38 (1-2): : 193 - 204
[2] TRIBOLOGICAL COATINGS DEPOSITED BY RED-HOT ROD TARGET SPUTTERING
DUCKWORTH, RG
[J]. THIN SOLID FILMS, 1980, 73 (02) : 275 - 282
[3] PORTO VG, 1969, NUCL PHYS A, VA136, P385
[4] COMPUTER-SIMULATION PROGRAMS FOR NUCLEAR-REACTION ANALYSIS
SIMPSON, JCB
EARWAKER, LG
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) : 502 - 507
[5] VERY HIGH-RATE REACTIVE SPUTTERING OF TIN, ZRN AND HFN
SPROUL, WD
[J]. THIN SOLID FILMS, 1983, 107 (02) : 141 - 147