TRANSFORMATION OF AMORPHOUS SNOX FILMS STUDIED BY ELECTRICAL-RESISTIVITY AND OPTICAL-TRANSMISSION

被引:1
作者
MURANAKA, S [1 ]
OKA, Y [1 ]
TAMADA, O [1 ]
机构
[1] KYOTO UNIV,GRAD SCH HUMAN & ENVIRONM STUDIES,KYOTO 606,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 3A期
关键词
AMORPHOUS SNO(X); CRYSTALLIZATION; THIN FILMS; ELECTRICAL RESISTIVITY; OPTICAL TRANSMISSION;
D O I
10.1143/JJAP.33.1307
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical resistivity and optical transmission of reactively evaporated amorphous SnO(x) films were measured as a function of the temperature. The films showed two drastic changes in both the electrical resistivity and optical transmission. The results indicated that the films were oxidized at about 250-degrees-C and then crystallized at about 400-degrees-C.
引用
收藏
页码:1307 / 1308
页数:2
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