ION PROJECTION LITHOGRAPHY FOR SUBMICRON MODIFICATION OF MATERIALS

[1] AKASAKA Y, 1974, J JPN SOC APPL PHYS, V43, P493

[2] BARTELT JL, 1986, SOLID STATE TECHNOL, V29, P215

[3] BEELE MIJ, 1985, MICROCIRCUIT ENG, V85, P451

[4] BEHRINGER U, 1982, OPTIK, V62, P59

[5] BOHLEN H, 1984, SOLID STATE TECHNOL, V27, P210

[6] BROWN WL, 1981, SOLID STATE TECHNOL, V24, P60

[7] BROWN WL, 1985, NATO ADV STUDY I ERO

[8] COOK CF, 1985, SOLID STATE TECHNOL, V28, P125

[9] CUMMINGS KD, 1986, P SPIE, V632

[10] PROTON ISOLATION FOR GAAS INTEGRATED-CIRCUITS [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1982, 30 (07) : 955 - 963

[1] AKASAKA Y, 1974, J JPN SOC APPL PHYS, V43, P493

[2] BARTELT JL, 1986, SOLID STATE TECHNOL, V29, P215

[3] BEELE MIJ, 1985, MICROCIRCUIT ENG, V85, P451

[4] BEHRINGER U, 1982, OPTIK, V62, P59

[5] BOHLEN H, 1984, SOLID STATE TECHNOL, V27, P210

[6] BROWN WL, 1981, SOLID STATE TECHNOL, V24, P60

[7] BROWN WL, 1985, NATO ADV STUDY I ERO

[8] COOK CF, 1985, SOLID STATE TECHNOL, V28, P125

[9] CUMMINGS KD, 1986, P SPIE, V632

[10] PROTON ISOLATION FOR GAAS INTEGRATED-CIRCUITS [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1982, 30 (07) : 955 - 963