THE OPTICAL AND MECHANICAL-PROPERTIES OF CARBON-FILMS GROWN USING A FAST ATOM BEAM SOURCE

被引：12

作者：

DEHBIALAOUI, A ^{[1
]}

MATTHEWS, A ^{[1
]}

FRANKS, J ^{[1
]}

机构：

[1] ION TECH LTD,TEDDINGTON TW11 0LT,ENGLAND

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 47卷 / 1-3期

关键词：

Coatings;

D O I：

10.1016/0257-8972(91)90345-W

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The fast atom beam (FAB) source offers a convenient means of investigating the influence of process variables on diamond-like carbon film formation (e.g. gas composition, energy, flux and direction). Here we describe the optical properties of films produced using a FAB source, reporting for the first time the influence of sample orientation on these properties and in particular the result that fully transparent films can be produced by mounting the sample at grazing incidence to the beam.

引用

页码：722 / 729

页数：8

共 7 条

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JAMES, AS
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[4] DIAMOND FILMS BY ION-ASSISTED DEPOSITION AT ROOM-TEMPERATURE
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[5] MICROMECHANICAL INVESTIGATIONS OF AMORPHOUS HYDROGENATED CARBON-FILMS ON SILICON
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[7] TAUC J, 1973, AMORPHOUS SEMICONDUC

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