FABRICATION OF INGAAS STRAINED QUANTUM-WIRE STRUCTURES USING SELECTIVE-AREA METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION GROWTH

被引:31
作者
ARAKAWA, T [1 ]
TSUKAMOTO, S [1 ]
NAGAMUNE, Y [1 ]
NISHIOKA, M [1 ]
LEE, JH [1 ]
ARAKAWA, Y [1 ]
机构
[1] UNIV TOKYO, ADV SCI & TECHNOL RES CTR, TOKYO 153, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 10A期
关键词
SELECTIVE-AREA MOCVD GROWTH; STRAINED QUANTUM WIRE; INGAAS GAAS; PHOTOLUMINESCENCE; CRITICAL THICKNESS;
D O I
10.1143/JJAP.32.L1377
中图分类号
O59 [应用物理学];
学科分类号
摘要
We fabricated InxGa1-x As strained quantum wire structures with various In compositions using a selective-area metal-organic chemical vapor deposition growth technique. Photoluminescence (PL) measurements at 14 K demonstrated that strained quantum wires of high quality were obtained when x is less than 0.35. Change of the full width at half-maximum of the PL peaks indicates that the structural dimensions of the quantum wires exceeded the critical thickness at around x=0.4.
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页码:L1377 / L1379
页数:3
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