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MATRIX CALCULATION OF PRESSURES IN HIGH-VACUUM SYSTEMS

被引：7
作者：
HIRANO, H
KONDO, Y
YOSHIMURA, N
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.575614
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2865 / 2869
页数：5
相关论文
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[1]   A 3-POINT-PRESSURE METHOD FOR MEASURING THE GAS-FLOW RATE THROUGH A CONDUCTING PIPE [J].
HIRANO, H ;
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2526-2532
[2]   RESISTOR NETWORK SIMULATION METHOD FOR A VACUUM-SYSTEM IN A MOLECULAR-FLOW REGION [J].
OHTA, S ;
YOSHIMURA, N ;
HIRANO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (01) :84-89
[3]  
STAUDHAMMER J, 1975, ELECTRICAL ENG SERIE, P50
[4]   A DIFFERENTIAL PRESSURE-RISE METHOD FOR MEASURING THE NET OUTGASSING RATES OF A SOLID MATERIAL AND FOR ESTIMATING ITS CHARACTERISTIC VALUES AS A GAS SOURCE [J].
YOSHIMURA, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2177-2183
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