DESIGN AND LASING OPERATION OF MICRO-ARC-RING LASERS

A micro-are-ring cavity (MARC) laser is proposed for microphotonic integrated circuits. This device is based on tightly confined optical waves by a total internal reflection in a lateral microcavity. We present a basic design concept of a MARC laser for low-threshold operation and for transverse mode control. We have fabricated a 0.98 mu m GaInAs/GaAs strained quantum well MARC laser by using direct electron beam lithography and reactive ion beam etching. The reflectivity of the etched reflector was estimated to be similar to 74% from the threshold.