STRUCTURE AND PROPERTIES OF REACTIVELY SPUTTERED GAMMA-MO2N HARD COATINGS

被引：23

作者：

ANITHA, VP ^{[1
]}

VITTA, S ^{[1
]}

MAJOR, S ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,DEPT MET ENGN,BOMBAY 400076,INDIA

来源：

THIN SOLID FILMS | 1994年 / 245卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(94)90867-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructure, mechanical properties and microhardness of Mo-N films deposited on stainless steel are studied in detail. X-ray and electron diffraction studies show that the films consist of a polycrystalline gamma-Mo2N phase. The microstructure was found to be independent of the type of substrate, stainless steel, silicon and glass used for deposition. The microhardness of the films was found to be 23.1 +/- 1.5 GPa, indicating that they may be used as hard protective coatings.

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页码：1 / 3

页数：3

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