CHEMICAL VAPOR-DEPOSITION OF REFRACTORY-METALS DISILICIDES - A REVIEW

被引：5

作者：

MADAR, R ^{[1
]}

BERNARD, C ^{[1
]}

机构：

[1] ECOLE MATH SUPER ELECTROCHIM & ELECTROMET GRENOBLE,INST NATL POLYTECH GRENOBLE,CNRS,UNITE 29,F-38402 ST MARTIN DHERES,FRANCE

来源：

JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期

关键词：

D O I：

10.1051/jphyscol:1989559

中图分类号：

学科分类号：

摘要：

引用

页码：479 / 497

页数：19

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