共 19 条
- [2] KORBURGER C, 1982, J ELECTROCHEM SOC, V129, P1307
- [3] KRAUTLE H, 1974, P INT C APPLICATIONS, P193
- [4] Lau C. K., 1982, International Electron Devices Meeting. Technical Digest, P714
- [5] LAU CK, 1983, ECS DIG EXT ABSTR, V83, P569
- [6] MCQUILLAN A, 1956, TITANIUM, P415
- [7] MERCHANT P, 1984, MAY WORKSH REFR MET, V2
- [8] MOHSEN A, 1984, MAY WORKSH REFR MET, V2
- [10] REFRACTORY SILICIDES FOR INTEGRATED-CIRCUITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (04): : 775 - 792