SYNTHESIS OF NB3AL THIN-FILMS BY MAGNETRON SPUTTERING

被引：13

作者：

TANABE, K

MICHIKAMI, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 05期

关键词：

D O I：

10.1143/JJAP.20.L359

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L359 / L362

页数：4

共 8 条

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[7] FABRICATION AND BARRIER DIAGNOSTICS OF SUPERCONDUCTIVE TUNNEL-JUNCTIONS ON NB-SN AND V-SI [J].

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[8] HIGH-RATE MAGNETRON SPUTTERING OF HIGH TC NB3SN FILMS [J].

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