COLOR OF TITANIUM NITRIDE PREPARED BY REACTIVE DC MAGNETRON SPUTTERING

被引：96

作者：

MUMTAZ, A

CLASS, WH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571461

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：345 / 348

页数：4

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