STRUCTURAL AND ELECTRICAL-PROPERTIES OF COMPOSITE METAL HARD CARBON-FILMS PREPARED FROM METALORGANICS

被引：2

作者：

EIFERT, H ^{[1
]}

LEHMBERG, H ^{[1
]}

PAGNIA, H ^{[1
]}

机构：

[1] TH DARMSTADT,INST ANGEW PHYS,W-6100 DARMSTADT,GERMANY

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 1991年 / 70卷 / 03期

关键词：

D O I：

10.1080/00207219108921305

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Composite metal/hard carbon films have been prepared by using metalorganic working gas mixtures in a radiofrequency driven plasma enhanced process. The film structure as observed by transmission electron microscopy and electron diffraction before and after heat treatment is described. Electrical conductivity versus temperature data are shown for one type of film.

引用

页码：527 / 531

页数：5

共 6 条

[1] IDENTIFICATION OF CARBON AND TANTALUM CHEMICAL-STATES IN METAL-DOPED A-C-H FILMS [J].

BENNDORF, C ;

GRISCHKE, M ;

KOEBERLE, H ;

MEMMING, R ;

BRAUER, A ;

THIEME, F .

SURFACE & COATINGS TECHNOLOGY, 1988, 36 (1-2) :171-181

[2]

BIEDERMAN H, 1987, P IPAT 87 BRIGHTON, P152

[3] THIN PALLADIUM FILMS PREPARED BY METAL-ORGANIC PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION [J].

FEURER, E ;

SUHR, H .

THIN SOLID FILMS, 1988, 157 (01) :81-86

[4] ELECTRON-MICROSCOPY STUDY OF THE INTERACTION OF NI, PD AND PT WITH CARBON .1. NICKEL CATALYZED GRAPHITIZATION OF AMORPHOUS-CARBON [J].

LAMBER, R ;

JAEGER, N ;

SCHULZEKLOFF, G .

SURFACE SCIENCE, 1988, 197 (03) :402-414

[5] DIAMONDLIKE AMORPHOUS-CARBON FILMS PREPARED BY MAGNETRON SPUTTERING OF GRAPHITE [J].

SAVVIDES, N ;

WINDOW, B .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2386-2390

[6]

SHUNK FA, 1969, CONSTITUTION BINARY

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