FACTOR-ANALYSIS, A USEFUL TOOL FOR SOLVING ANALYTICAL PROBLEM IN AES AND XPS - A STUDY OF THE PERFORMANCES AND LIMITATIONS OF THE INDICATOR FUNCTION

被引:23
作者
ARRANZ, A
PALACIO, C
机构
[1] Departmento de Física Aplicada, Facultad de Ciencias C-Xii, Universidad Autónoma de Madrid, Cantoblanco, Madrid
关键词
D O I
10.1002/sia.740220123
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Computer simulations have been used in order to investigate an objective procedure to determine the number of principal factors when factor analysis is used for solving analytical problems in AES and XPS. The indicator (IND) function has been used in the investigation. The simulated results show that the IND function could be used for detecting and solving sampling misalignment problems. Furthermore, the S/N ratio, the severe overlap of spectra and the relative importance of the various factors involved can limit the sensitivity of the IND function to determine the correct number of principal factors.
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页码:93 / 97
页数:5
相关论文
共 25 条
[1]   QUANTITATIVE DEPTH PROFILING OF NITROGEN-IMPLANTED TITANIUM BY USE OF AUGER-ELECTRON SPECTROSCOPY AND SUBSEQUENT TARGET FACTOR-ANALYSIS [J].
BUBERT, H ;
MUCHA, A .
SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) :187-191
[2]   PRINCIPAL COMPONENT ANALYSIS OF AUGER LINE-SHAPES AT SOLID-SOLID INTERFACES [J].
GAARENSTROOM, SW .
APPLIED SURFACE SCIENCE, 1981, 7 (1-2) :7-18
[3]   APPLICATION OF AUGER LINE-SHAPES AND FACTOR-ANALYSIS TO CHARACTERIZE A METAL-CERAMIC INTERFACIAL REACTION [J].
GAARENSTROOM, SW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :458-461
[4]   APPLICATION OF FACTOR-ANALYSIS TO ELEMENTAL DETECTION LIMITS IN SPUTTER DEPTH PROFILING [J].
GAARENSTROOM, SW .
APPLIED SURFACE SCIENCE, 1986, 26 (04) :561-574
[5]   CHEMICAL CHARACTERIZATION FROM CARBON AUGER-SPECTRA BY APPLICATION OF PATTERN-RECOGNITION AND FACTOR-ANALYSIS [J].
GAARENSTROOM, SW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :600-604
[6]   ANALYSIS OF MULTILAYERED STRUCTURES BY A NONCONVENTIONAL AUGER DEPTH PROFILING METHOD [J].
GATTS, C ;
LOSCH, W .
VACUUM, 1990, 41 (7-9) :1676-1679
[7]   APPLICATION OF FACTOR-ANALYSIS TO AUGER CRATER-EDGE PROFILING [J].
GATTS, C ;
LOSCH, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (06) :2982-2985
[8]   FACTOR-ANALYSIS AND SUPERPOSITION OF AUGER-ELECTRON SPECTRA APPLIED TO ROOM-TEMPERATURE OXIDATION OF NI AND NICR21FE12 [J].
HOFMANN, S ;
STEFFEN, J .
SURFACE AND INTERFACE ANALYSIS, 1989, 14 (1-2) :59-65
[9]   THE STAGES OF OXYGEN-ADSORPTION ON POLYCRYSTALLINE IRON STUDIED THROUGH FACTOR-ANALYSIS APPLIED TO O KLL AND FEM23VV D(NE)/DE AUGER-SPECTRA [J].
JANSSON, C ;
MORGEN, P .
SURFACE SCIENCE, 1990, 233 (1-2) :84-88
[10]   FACTOR-ANALYSIS OF D(NE) DE AUGER-ELECTRON SPECTRA OF AUCU ALLOYS - SURFACE-COMPOSITION DURING AR+ ION-BOMBARDMENT AND OXIDATION [J].
JANSSON, C ;
MORGEN, P .
SURFACE AND INTERFACE ANALYSIS, 1990, 15 (01) :1-6