THE WAVELENGTH MODULATION SPECTRUM OF ION-IMPLANTED SILICON

被引:11
作者
LUE, JT [1 ]
SHAW, SY [1 ]
机构
[1] NATL TSING HUA UNIV,DEPT PHYS,HSINCHU 300,TAIWAN
关键词
D O I
10.1063/1.331443
中图分类号
O59 [应用物理学];
学科分类号
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页码:5617 / 5620
页数:4
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