INTERFERENCE GRATING FABRICATION IN SPIN-COATED AS2S3 FILMS

被引:44
作者
HAJTO, E [1 ]
EWEN, PJS [1 ]
BELFORD, RE [1 ]
OWEN, AE [1 ]
机构
[1] NAPIER COLL,DEPT PHYS,EDINBURGH EH10 5DT,SCOTLAND
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1016/0040-6090(91)90195-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The optical properties and solubility of spin-coated AS2S3 films significantly change after silver is introduced by photodiffusion. The different types of holographic grating that can be fabricated in spin-coated Ag/As2S3 double film structures by photodiffusion and subsequent selective etching are described in this paper. The silver diffusion occurs under the influence of visible monochromatic light and the grating pattern is produced by a holographic arrangement.
引用
收藏
页码:229 / 237
页数:9
相关论文
共 17 条
[1]  
Abeles F., OPTICAL PROPERTIES S
[2]   SPIN COATED AMORPHOUS-CHALCOGENIDE FILMS - THERMAL-PROPERTIES [J].
CHERN, GC ;
LAUKS, I ;
MCGHIE, AR .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4596-4601
[3]   SPIN COATED AMORPHOUS-CHALCOGENIDE FILMS - STRUCTURAL CHARACTERIZATION [J].
CHERN, GC ;
LAUKS, I .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2701-2705
[4]   SPIN-COATED AMORPHOUS-CHALCOGENIDE FILMS [J].
CHERN, GC ;
LAUKS, I .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :6979-6982
[5]  
Fukaya T., 1973, Optics Communications, V7, P98, DOI 10.1016/0030-4018(73)90076-X
[6]   SPECTROSCOPIC INVESTIGATION OF SPIN-DEPOSITED AS-S AMORPHOUS FILMS [J].
HAJTO, E ;
EWEN, PJS ;
HILL, PG ;
OWEN, AE .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 114 (02) :587-597
[7]   DRY ETCHED HIGH-RESOLUTION POSITIVE AND NEGATIVE INORGANIC PHOTORESIST [J].
HAJTO, E ;
BELFORD, RE ;
EWEN, PJS ;
OWEN, AE .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 115 (1-3) :129-131
[8]   OPTICAL-PROPERTIES OF SPIN-COATED AMORPHOUS-CHALCOGENIDE THIN-FILMS [J].
HAJTO, E ;
EWEN, PJS ;
BELFORD, R ;
HAJTO, J ;
OWEN, AE .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :1191-1194
[9]   INTERFERENCE (HOLOGRAPHIC) DIFFRACTION GRATINGS [J].
HUTLEY, MC .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (07) :513-520
[10]  
Hutley MC, 1982, DIFFRACTION GRATINGS