DRY ETCHED HIGH-RESOLUTION POSITIVE AND NEGATIVE INORGANIC PHOTORESIST

被引：11

作者：

HAJTO, E

BELFORD, RE

EWEN, PJS

OWEN, AE

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 115卷 / 1-3期

关键词：

D O I：

10.1016/0022-3093(89)90383-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：129 / 131

页数：3

共 9 条

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[9] SUB-MICRON OPTICAL LITHOGRAPHY USING AN INORGANIC RESIST-POLYMER BILEVEL SCHEME [J].

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