BULK GROWTH, COMPOSITION AND MORPHOLOGY OF GALLIUM MANGANESE ANTIMONIDE - A NEW TERNARY ALLOY SYSTEM

被引:18
作者
BASU, S
ADHIKARI, T
机构
[1] Semiconductor Preparation and Processing Laboratory, Materials Science Centre, IIT, Kharagpur
关键词
D O I
10.1016/0925-8388(94)90770-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Polycrystalline ingots of gallium manganese antimonide [Ga1-xMnxSb (0<x<0.1)], a new and promising III-V semimagnetic semiconductor, were grown by the vertical Bridgman method. The X-ray diffraction using CuKalpha radiation confirmed the formation of the crystals and the lattice parameters were used to determine the composition of the crystals. From electron probe microanalysis the homogeneity of the composition along the length and the diameter of the ingot was examined. The wafer morphology was investigated by optical microscopy. The etch pit density (EPD) was determined by the image analysis method. The variation of EPD along the length and diameter of the ingot as well as with the Mn concentration was studied.
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页码:81 / 85
页数:5
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