MODELING OF THE ENERGY DEPOSITION MECHANISMS IN AN ARGON MAGNETRON PLANAR DISCHARGE

被引：36

作者：

GUIMARAES, F ^{[1
]}

ALMEIDA, J ^{[1
]}

BRETAGNE, J ^{[1
]}

机构：

[1] UNIV PARIS 11,PHYS GAZ & PLASMAS LAB,CNRS,UA 0073,F-91405 ORSAY,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 01期

关键词：

D O I：

10.1116/1.577113

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The model for the planar magnetron discharge is based on the resolution of the Boltzmann equation for the electron energy distribution function corresponding to the plasma region of the discharge. It assumes that electron transport is controlled by binary collisions; effects of Coulomb collisions are included. The influence of the main discharge parameters (gas density, discharge current and voltage) is studied. Comparison of the (V(d)-I(d)) characteristics predicted by the model with experimental ones is made allowing some confidence in the model.

引用

页码：133 / 140

页数：8

共 13 条

[1]

AIKEN RC, 1985, STIFF COMPUTATION, pCH4

[2]

[Anonymous], 1964, PLASMA KINETIC THEOR

[3] THEORETICAL-ANALYSIS OF THE X-RAY INITIATION OF A HIGH-PRESSURE ARGON DISCHARGE FOR LASER APPLICATIONS [J].

BRETAGNE, J ;

LOUVET, Y .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (03) :827-832

[4] LOW-ENERGY ELECTRON-DISTRIBUTION IN AN ELECTRON-BEAM-GENERATED ARGON PLASMA [J].

BRETAGNE, J ;

GODART, J ;

PUECH, V .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (11) :2205-2225

[5] RELATIVISTIC ELECTRON-BEAM-PRODUCED PLASMAS .1. COLLISION CROSS-SECTIONS AND LOSS FUNCTION IN ARGON [J].

BRETAGNE, J ;

CALLEDE, G ;

LEGENTIL, M ;

PUECH, V .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (05) :761-777

[6] ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN ELECTRON-BEAM-SUSTAINED DISCHARGES - APPLICATION TO MAGNETIC MULTICUSP HYDROGEN DISCHARGES [J].

BRETAGNE, J ;

DELOUYA, G ;

GORSE, C ;

CAPITELLI, M ;

BACAL, M .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1985, 18 (05) :811-825

[7]

BRETAGNE J, 1981, J PHYS D, V14, P1125

[8]

Chapman B., 1980, GLOW DISCHARGE PROCE

[9] MEASUREMENTS OF SECONDARY-ELECTRON EMISSION IN REACTIVE SPUTTERING OF ALUMINUM AND TITANIUM NITRIDE [J].

LEWIS, MA ;

GLOCKER, DA ;

JORNE, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1989, 7 (03) :1019-1024

[10] MONTE-CARLO SIMULATION OF IONIZATION IN A MAGNETRON PLASMA [J].

MIRANDA, JE ;

GOECKNER, MJ ;

GOREE, J ;

SHERIDAN, TE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03) :1627-1631

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