CONTROL OF DEPOSITION OF SILICON NITRIDE LAYERS BY 2537A RADIATION

[1] [Anonymous], ELECTROMAGNETIC THEO

[2] BORN M, 1965, PRINCIPLES OPTICS

[3] BRAUER G, 1954, HDB PRAPARATIVEN ANO, P360

[4] DEPOSITING SILICON NITRIDE LAYERS AT LOW TEMPERATURE USING A PHOTOCHEMICAL REACTION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (01) : 110 - &

[5] PREPARATION AND PROPERTIES OF PYROLYTIC SILICON NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (12) : 1279 - &

[6] ELGIN JC, 1929, J AM CHEM SOC, V51, P2059

[7] Effect of light on the ignition of monosilane-oxygen mixtures. [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1936, 32 (02): : 1577 - 1583

[8] FRANZ J, 1968, SOLID STATE ELECTRON, V11, P59

[9] STANDING WAVE INTERFERENCE PATTERNS IN PHOTORESISTS OBSERVED WITH A SCANNING ELECTRON MICROSCOPE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (08) : 1079 - +

[10] GRIECO HF, 1966, OCT EL SOC M PHIL

[1] [Anonymous], ELECTROMAGNETIC THEO

[2] BORN M, 1965, PRINCIPLES OPTICS

[3] BRAUER G, 1954, HDB PRAPARATIVEN ANO, P360

[4] DEPOSITING SILICON NITRIDE LAYERS AT LOW TEMPERATURE USING A PHOTOCHEMICAL REACTION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (01) : 110 - &

[5] PREPARATION AND PROPERTIES OF PYROLYTIC SILICON NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (12) : 1279 - &

[6] ELGIN JC, 1929, J AM CHEM SOC, V51, P2059

[7] Effect of light on the ignition of monosilane-oxygen mixtures. [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1936, 32 (02): : 1577 - 1583

[8] FRANZ J, 1968, SOLID STATE ELECTRON, V11, P59

[9] STANDING WAVE INTERFERENCE PATTERNS IN PHOTORESISTS OBSERVED WITH A SCANNING ELECTRON MICROSCOPE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (08) : 1079 - +

[10] GRIECO HF, 1966, OCT EL SOC M PHIL