THE EFFECT OF SUBSTRATE BIAS ON THE GROWTH OF PBTE FILMS DEPOSITED ONTO BAF2 BY RF MAGNETRON SPUTTERING

被引：8

作者：

DAS, SR

COOK, JG

PHIPPS, M

BOLAND, WE

机构：

[1] UNIV OTTAWA,DEPT PHYS,OTTAWA K1N 6N5,ONTARIO,CANADA

[2] NATL RES COUNCIL CANADA,DIV PHYS,PHOTON LAB,OTTAWA K1A 0R6,ONTARIO,CANADA

来源：

THIN SOLID FILMS | 1989年 / 181卷

关键词：

D O I：

10.1016/0040-6090(89)90489-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：227 / 233

页数：7

共 28 条

[1] SUBSTRATE DEPENDENCE OF STRUCTURAL AND TRANSPORT-PROPERTIES OF RF SPUTTERED PBTE FILMS [J].

BALESTRINO, G ;

DAMICO, A ;

PETROCCO, G ;

TUCCIARONE, A .

MATERIALS RESEARCH BULLETIN, 1983, 18 (12) :1443-1449

[2] PREPARATION OF POLISHED SUBSTRATES OF BAF2 [J].

BIS, RF ;

FARABAUGH, EN ;

MUTH, EP .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (02) :736-740

[3] GROWTH OF PBTE DOPING SUPERLATTICES BY HOT WALL EPITAXY [J].

CLEMENS, H .

JOURNAL OF CRYSTAL GROWTH, 1988, 88 (02) :236-240

[4] GROWTH AND CHARACTERIZATION OF PBTE EPITAXIAL-FILMS GROWN BY HOT-WALL EPITAXY [J].

CLEMENS, H ;

FANTNER, EJ ;

RUHS, W ;

BAUER, G .

JOURNAL OF CRYSTAL GROWTH, 1984, 66 (02) :251-256

[5] EMISSION-SPECTROSCOPY AS A NONINVASIVE PROBE FOR PROCESS-CONTROL DURING RADIO-FREQUENCY SPUTTER DEPOSITION OF PBTE [J].

COOK, JG ;

AOUADI, MS ;

DAS, SR .

CANADIAN JOURNAL OF PHYSICS, 1989, 67 (04) :287-293

[6]

COOK JG, 1988, CHEMTRONICS, V3, P166

[7] PBXSN1-XTE LAYERS BY RF MULTICATHODE SPUTTERING [J].

CORSI, C .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (08) :3467-3471

[8] PBTE RF-SPUTTERED INFRARED DETECTORS [J].

CORSI, C .

APPLIED PHYSICS LETTERS, 1974, 24 (03) :137-139

[9] MICROSTRUCTURAL, OPTICAL AND ELECTRICAL STUDIES OF SPUTTERED EPITAXIAL CDTE-FILMS [J].

DAS, SR ;

COOK, JG .

THIN SOLID FILMS, 1988, 163 :409-414

[10] ION-ASSISTED SPUTTER DEPOSITION OF CDTE LAYERS [J].

DAS, SR ;

RAJAN, K ;

VANDERMEER, P ;

COOK, JG .

CANADIAN JOURNAL OF PHYSICS, 1987, 65 (08) :864-867

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