LOW-STRESS TANTALUM ABSORBERS DEPOSITED BY SPUTTERING FOR X-RAY MASKS

被引:22
作者
IIMURA, Y
MIYASHITA, H
SANO, H
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词
D O I
10.1116/1.584481
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1680 / 1683
页数:4
相关论文
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