TEMPERATURE STABILITY OF ALXGA1-XAS (0 LESS-THAN-OR-EQUAL-TO X LESS-THAN-OR-EQUAL-TO 1) THERMAL OXIDE MASKS FOR SELECTIVE-AREA EPITAXY

被引：5

作者：

JONES, SH ^{[1
]}

LAU, KM ^{[1
]}

POUCH, JJ ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.341894

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：922 / 925

页数：4

共 12 条

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