COBALT LATTICE DIFFUSION IN BULK COBALT DISILICIDE

被引：22

作者：

BARGE, T ^{[1
]}

POIZE, S ^{[1
]}

BERNARDINI, J ^{[1
]}

GAS, P ^{[1
]}

机构：

[1] EUROPEAN SILICON STRUCT,ZI ROUSSET,F-13106 ROUSSET,FRANCE

来源：

APPLIED SURFACE SCIENCE | 1991年 / 53卷

关键词：

D O I：

10.1016/0169-4332(91)90260-Q

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Lattice diffusion of cobalt in cobalt disilicide has been studied using Co-60, conventional sectioning techniques and bulk samples of different compositions (stoichiometric, with small excess of silicon or cobalt). In the temperature range 760-1100-degrees-C, the cobalt lattice diffusion coefficients vary between 3 x 10(-15) and 9 x 10(-12) cm2/s with an activation energy of 2.83 eV. They are not influenced by silicon or cobalt excess. These values and the "relatively" high activation energy indicate a slow cobalt diffusion.

引用

页码：180 / 185

页数：6

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