THE USE OF TITANIUM-BASED CONTACT BARRIER LAYERS IN SILICON TECHNOLOGY

被引：172

作者：

TING, CY

WITTMER, M

机构：

来源：

THIN SOLID FILMS | 1982年 / 96卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90516-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：327 / 345

页数：19

相关论文

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