ELECTRICAL CHARACTERISTICS OF AL CONTACT TO NISI USING THIN W LAYER AS A BARRIER

被引：16

作者：

BARTUR, M

NICOLET, MA

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 10期

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D O I：

10.1063/1.92571

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：822 / 824

页数：3

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