VERTICAL BRIDGMAN GROWTH AND CHARACTERIZATION OF LARGE-DIAMETER SINGLE-CRYSTAL CDTE

被引:19
作者
CASAGRANDE, LG [1 ]
DIMARZIO, D [1 ]
LEE, MB [1 ]
LARSON, DJ [1 ]
DUDLEY, M [1 ]
FANNING, T [1 ]
机构
[1] SUNY STONY BROOK,DEPT MAT SCI & ENGN,STONY BROOK,NY 11794
基金
美国能源部;
关键词
D O I
10.1016/S0022-0248(07)80003-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report on the growth of 64 mm diameter single crystals of CdTe using a large-bore, high-thermal mass, multizone vertical Bridgman furnace. Ampoules are carefully prepared so that the probability of melt adhesion or spurious nucleation is reduced. The longitudinal thermal gradient imposed on the solidifying boule is less than 10-degrees-C cm-1, and the hot and cold zone temperatures have been adjusted to reduce the interface curvature and the thermal stress on the growing crystal and the solidified portion of the boule. Post-solidification processing of the boule, including in-situ annealing and cooling rate, is designed to reduce the size of precipitates as well as residual strain. Wafers taken from the crystals have been structurally and chemically characterized. We have been able to establish a correlation between features identified on high-quality surfaces of CdTe using synchrotron white beam topography (SWBT) and Nakagawa-etch-pit micrographs. We propose that SWBT can be utilized as an alternative to destructive etch pit analysis to characterize the {111}A surface defect structure, as well as to image the Nakagawa-inert {111}B surface or other surfaces of interest.
引用
收藏
页码:576 / 581
页数:6
相关论文
共 38 条
[31]   CRYSTAL-GROWTH OF LARGE-AREA SINGLE-CRYSTAL CDTE AND CDZNTE BY THE COMPUTER-CONTROLLED VERTICAL MODIFIED-BRIDGMAN PROCESS [J].
SEN, S ;
KONKEL, WH ;
TIGHE, SJ ;
BLAND, LG ;
SHARMA, SR ;
TAYLOR, RE .
JOURNAL OF CRYSTAL GROWTH, 1988, 86 (1-4) :111-117
[32]   EFFECTS INFLUENCING THE STRUCTURAL INTEGRITY OF SEMICONDUCTORS AND THEIR ALLOYS [J].
SHER, A ;
CHEN, AB ;
SPICER, WE ;
SHIH, CK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (01) :105-111
[33]   PROPERTIES OF CDTE CRYSTALS GROWN BY THM USING CD AS THE SOLVENT [J].
TRIBOULET, R ;
LEGROS, R ;
HEURTEL, A ;
SIEBER, B ;
DIDIER, G ;
IMHOFF, D .
JOURNAL OF CRYSTAL GROWTH, 1985, 72 (1-2) :90-96
[34]  
TRIVEDI SB, 1991, 4TH E REG C CRYST GR
[35]   A STUDY OF LAPPING AND POLISHING DAMAGE IN SINGLE-CRYSTAL CDTE [J].
WEIRAUCH, DF .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (01) :250-254
[36]   MASS-TRANSPORT AND CRYSTAL-GROWTH OF CADMIUM TELLURIDE BY PVT [J].
WIEDEMEIER, H ;
BAI, YC .
JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (12) :1373-1381
[37]   CRYSTAL-GROWTH OF CDTE IN A MULTIZONE VERTICAL BRIDGMAN FURNACE WITH A PBN CRUCIBLE [J].
YASUDA, K ;
IWAKAMI, Y ;
SAJI, M .
JOURNAL OF CRYSTAL GROWTH, 1990, 99 (1-4) :727-730
[38]  
ZANIO K, 1978, SEMICONDUCTORS SEMIM, V13