SUBSTRATE BIAS EFFECT ON THE CAPTURE KINETICS OF RANDOM TELEGRAPH SIGNALS IN SUBMICRON P-CHANNEL SILICON METAL-OXIDE-SEMICONDUCTOR TRANSISTORS

被引:9
作者
SIMOEN, E
CLAEYS, C
机构
[1] IMEC, B-3001 Leuven
关键词
D O I
10.1063/1.114025
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter investigates the effect of the substrate bias on the capture kinetics of random telegraph signals in submicron silicon p-channel metal-oxide-semiconductor transistors. A strong dependence of the capture time constant τc on the transverse electric field is observed. As a result, τc∼exp(-Ap) is observed experimentally, which is much stronger than the 1/p dependence predicted by simple Shockley-Read-Hall theory, whereby p is the surface density of free holes. The observations are explained tentatively by considering a field-dependent hole capture cross section. The latter may result from quantization effects induced by the transverse field in the two-dimensional inversion layer. © 1995 American Institute of Physics.
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页码:598 / 600
页数:3
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