STRUCTURAL INVESTIGATION OF AROMATIC POLYIMIDE FILMS MODIFIED BY ION-BEAMS - A COMPARATIVE-STUDY

被引：14

作者：

XU, D

XU, XL

ZOU, SC

机构：

[1] Ion Beam Lab., Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 24期

关键词：

D O I：

10.1063/1.105780

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

X-ray photoelectron (XPS) and Raman spectroscopy were employed in the structural investigation of the modified polyimide films irradiated with boron ion beams. XPS discloses the formation of graphite bonding especially when irradiation comes up to a dose around 3 X 10(16) B+/cm2. Raman spectroscopy, together with the calculation of its reduced spectra as well as the one-phonon state density of amorphous graphite, is inclined to demonstrate a structural similarity between modified polyimide films and amorphous graphite in short range order. The degree of this similarity depends on the irradiation condition. From this view point, the effects of dose and beam current density upon the final microstructures of the irradiated polyimide films were also investigated.

引用

收藏

页码：3110 / 3112

页数：3

相关论文

共 11 条

[1] RELATION BETWEEN STRUCTURE AND ELECTRONIC-PROPERTIES OF ION IRRADIATED POLYMERS [J].

DAVENAS, J ;

XU, XL ;

BOITEUX, G ;

SAGE, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) :754-763

[2] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].

DILLON, RO ;

WOOLLAM, JA ;

KATKANANT, V .

PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489

[3] ION-BEAM INDUCED CARBON CLUSTERS IN POLYMERS [J].

FINK, D ;

IBEL, K ;

GOPPELT, P ;

BIERSACK, JP ;

WANG, L ;

BEHAR, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :342-346

[4] TEMPERATURE SENSITIVE ION-IMPLANTED POLYMER-FILMS [J].

GIEDD, RE ;

MOSS, MG ;

CRAIG, MM ;

ROBERTSON, DE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 (pt 2) :1253-1256

[5] CHEMICAL AND PHYSICAL CHANGES INDUCED IN POLYVINYLIDENE FLUORIDE BY IRRADIATION WITH HIGH-ENERGY IONS [J].

GUZMAN, AM ;

CARLSON, JD ;

BARES, JE ;

PRONKO, PP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :468-472

[6] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].

KNIGHT, DS ;

WHITE, WB .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :385-393

[7]

OKATA S, 1989, NUCL INSTRUM METH B, V37, P720

[8] RAMAN-SCATTERING SELECTION-RULE BREAKING AND DENSITY OF STATES IN AMORPHOUS MATERIALS [J].

SHUKER, R ;

GAMMON, RW .

PHYSICAL REVIEW LETTERS, 1970, 25 (04) :222-&

[9] RAMAN SPECTRA OF AMORPHOUS SI AND RELATED TETRAHEDRALLY BONDED SEMICONDUCTORS [J].

SMITH, JE ;

BRODSKY, MH ;

CROWDER, BL ;

NATHAN, MI ;

PINCZUK, A .

PHYSICAL REVIEW LETTERS, 1971, 26 (11) :642-&

[10] SHRINKAGE EFFECTS OF POLYIMIDE FILM UNDER ION-BEAM IRRADIATION [J].

XU, XL ;

YU, YH ;

LIN, ZX ;

CHEN, LZ ;

FANG, F ;

ZHOU, ZY ;

ZOU, SC ;

DU, GD ;

XIA, GQ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 (pt 2) :1267-1270