NUCLEATION AND GROWTH OF TITANIUM SILICIDE STUDIED BY INSITU ANNEALING IN A TRANSMISSION ELECTRON-MICROSCOPE

被引：27

作者：

RAAIJMAKERS, IJMM

READER, AH

VANHOUTUM, HJW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 07期

关键词：

D O I：

10.1063/1.337928

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2527 / 2532

页数：6

共 24 条

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