IC PIEZORESISTIVE PRESSURE SENSOR FOR BIOMEDICAL INSTRUMENTATION

被引：52

作者：

SAMAUN ^{[1
]}

WISE, KD ^{[1
]}

ANGELL, JB ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305

来源：

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING | 1973年 / BM20卷 / 02期

关键词：

D O I：

10.1109/TBME.1973.324170

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

引用

页码：101 / 109

页数：9

共 13 条

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[9] APPLICATION OF PREFERENTIAL ELECTROCHEMICAL ETCHING OF SILICON TO SEMICONDUCTOR DEVICE TECHNOLOGY [J].

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